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Dongjin develops, manufactures and markets
chemical mechanical polishing (CMP) slurries.
These slurry materials are used in polishing wafers,
a necessary step in providing a smooth surface
for the following layer of circuitry in the manufacture
of chips.
In addition to providing CMP slurries for the
mainstay silicon and aluminum wafer markets, Dongjin
has expertise in the new copper slurry technology.
DSO series are chemical mechanical polishing (CMP)
slurries for oxide layers, composed of 12 wt%
high purity fumed silica stabilized by a potassium
hydroxide.
DSW series are chemical mechanical polishing (CMP)
slurries for tungsten, titanium and oxide layers.
They are composed of high purity fumed silica or alumina.
DST series are chemical mechanical polishing (CMP)
slurries for STI process, which offers a high
selectivity and extremely low defect count.
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