Dongjin's thinners and strippers for photoresists provide processing
choices and performance advantages over current industry standards.
Thinner products provide world-class edge bead removal while complying with industry standards for purity, packaging and environmental protection. Thinners and strippers are used to remove excess photoresists
and residues after the etching stage of substate.

DPSS-4020N effectively removes positive photoresists as well as post-etch residues associated with high-energy plasma etchers and ashers.
It shows excellent compatibility with los-k dielectric materials and
metals such as TiN, Al.

※ DPSS-4020N is recommended for hard post-etch residue removal.


- Rapid Removal of Post Etch Residue and other Inorganic Residues
- Low Processing Temperature
- Short Processing Time
- Excellent Miscibility with Water


DPSS-5000 is a highly effective acid-based stripper with performance like other commercially available product and it is excellent for use with single
wafer spray tools.

※ DPSS-5000 is recommended for general post-etch residue removal and used with single wafer spray tools.


- Acid-based Stripper
- Effectively Remove Post-Etch Residues
- Low Corrosive to Meal ( Al, TiN, W )
- Completely Water Soluble
- Compatible with Low-k Material



DPT-PJ4 is a photoresist thinner for EBR, back side rinsing and line
flushing process.


- Superior EBR profile in g-line, I-line & KrF, ArF photoresist, BARC, SOG
  (FOX, T-12)
- Excellent Dissolution Rate